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dc.contributor.authorBeyaz, Mustafa İlker
dc.contributor.authorHanrahan, Brendan M.
dc.contributor.authorFeldman, Jeremy H.
dc.contributor.authorGhodssi, Reza
dc.date.accessioned2020-01-06T12:43:59Z
dc.date.available2020-01-06T12:43:59Z
dc.date.issued2013
dc.identifier.citationBeyaz, M. İ., Hanrahan, B. M., Feldman, J. H. & Ghodssi, R. (2013). An integrated permanent magnet Micro-turbo- generator supported on microball bearings. Journal of Microelectromechanical Systems, 22(3), 794-803.en_US
dc.identifier.issn1057-7157
dc.identifier.urihttp://hdl.handle.net/20.500.12566/242
dc.description.abstractThis paper presents the design, fabrication, and testing of an integrated microturbogenerator utilizing permanent magnets and microball bearings. The key components of this generator are the following: 1) a silicon microturbine rotor housing thick magnetic components; 2) encapsulated microball bearings providing a simple actuation scheme and a robust support structure; and 3) wafer-thick stator coils. The microturbogenerator was designed and fabricated to have a ten-pole rotor and a ten-pole three-turns-per-pole stator. The impedance of the stator coils was shown to be a purely resistive 220 Ω up to 10 kHz. The spin-down characterization of the rotor revealed a dynamic friction torque of 33 μN · m at a rotational speed of 16 kilo rotations per minute (krpm), corresponding to 6% turbine efficiency. The maximum per-phase ac open-circuit voltage and power were measured to be 0.1 V and 5.6 μW on a matched load at 23 krpm, respectively, in full agreement with theoretical analysis and performance estimations. The microturbogenerator presented in this paper provides a flexible design platform for further improvement and will lead to the development of next-generation integrated micro turbogenerators offering high power, simple operation, and robust mechanics.en_US
dc.description.sponsorshipNo sponsoren_US
dc.language.isoengen_US
dc.publisherJournal of Microelectromechanical Systemsen_US
dc.rightsinfo:eu-repo/semantics/embargoedAccessen_US
dc.subjectMicro generatoren_US
dc.subjectMikro jeneratörtr_TR
dc.subjectMicro turbogeneratoren_US
dc.subjectMikro turbojeneratörtr_TR
dc.subjectPower microelectromechanical systems (MEMS)en_US
dc.subjectGüç mikroelektromekanik sistemleri (MEMS)tr_TR
dc.titleAn integrated permanent magnet Micro-turbo- generator supported on microball bearingsen_US
dc.typeinfo:eu-repo/semantics/articleen_US
dc.relation.publicationcategoryInternational publicationen_US
dc.identifier.volume22
dc.identifier.issue3
dc.identifier.startpage794
eperson.identifier.endpage803
dc.contributor.orcid0000-0003-4591-2882 [Beyaz, Mustafa İlker]
dc.contributor.abuauthorBeyaz, Mustafa İlker
dc.contributor.yokid107317 [Beyaz, Mustafa İlker]
dc.identifier.doihttps://doi.org/10.1109/JMEMS.2013.2245401


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