Ara
Toplam kayıt 4, listelenen: 1-4
Non-planar drive-sense coil structure for inductive MEMS microphones
(International Symposium on Advanced Engineering Technologies, 2019)
MEMS technology offers major advantages for the development of microphones including a small footprint, low power consumption, high sound sensitivity and bandwidth. Capacitive, piezoelectric, and inductive microphones have ...
A micro-scale biosensor for the detection of bacillus stearothermophilus spore germination
(International Conference on Engineering Technologies (ICENTE'19), 2019)
Germination of Bacillus Stearothermophilus bacterial spores is being used as a marker in sterilization monitoring systems to verify the success of sterilization processes in healthcare facilities. Such systems mainly employ ...
A turbine-based MEMS sensor for spirometry with wearable devices
(IEEE Sensors Journal, 2019)
This paper presents a turbine-based microelectromechanical systems (MEMS) sensor for spirometry application. The compact sensor dimensions allow integration into smart wearable devices for mobile spirometry without a ...
Investigation of diamagnetic levitation for dynamic MEMS devices
(4th International Mediterranean Science and Engineering Congress (IMSEC 2019), 2019)
The mechanical performance and lifetime of dynamic MEMS (micro electro mechanical systems) devices such as micropumps, micromotors, and micropositioners heavily rely on the bearing mechanism that enables motion per applied ...